微型氢气传感器驱动设计及信号检测技术研究-物理电子学专业论文.docxVIP

摘要摘要随着现代工业的发展，氢气作为一种重要的工业原料在电力、航天、化工等 各部门得到了广泛的应用。但是氢气的不确定泄漏可能危害生命或对工业设备造 成极大的破坏，因此，如何对氢气浓度进行快速精确的在线测量变得越来越重要。 针对目前氢气检测的各种弊端，设计了一种基于微压电声学谐振腔的氢气浓度检 测系统。文章主要包括以下内容：1. 研究了氢气的特点以及对目前主要的氢气检测原理及方法进行了比较。提 出了基于压电声学谐振腔的微结构传感器的氢气检测方法，给出了传感器的工作 原理，结构设想图，以及振动仿真分析图。2．构建了基于微型氢气传感器的氢气浓度检测系统的硬件平台。根据传感器 的工作原理，设计了传感器的驱动和信号检测电路。确定了以 ADSP-BF531 为核 心的处理单元，并介绍了 ADSP-BF531 最小系统的设计，给出了电路原理图和实 物图。3．设计了微型氢气传感器的氢气浓度检测系统的软件。包括了：用户界面的 设计，flash 芯片烧写程序设计，以及 DSP 与各硬件模块通信程序和 DSP 内部数据 处理滤波，频率估计，谱峰搜索等算法。4．通过实验，测试了系统的性能，并对结果进行了分析 关键字：压电声学谐振腔，频率估计，滤波，数字信号处理。IABSTRACTABSTRACTWith the development of modern industry, hydrogen as an important industrial raw material has been widely used in the electric power, aerospace, chemical and other sectors. However, the uncertainty of hydrogen leakage is likely to endanger the life and cause a great damage to the industrial equipment. Therefore, how to measure the concentration of the hydrogen accurately and fast on-line is becoming increasingly important. Because of the disadvantages of the Hydrogen detection methods at present, the hydrogen micro-sensor detection system was designed based on a new type of piezoelectric-sound-resonance cavity (PSRC). The article mainly includes the following:The characteristics of hydrogen have been studied and the principles of hydrogen detection were compared. The detection methods of micro-structure sensor based on the piezoelectric-sound-resonance cavity, the working principle of the sensor, the map of the structure, and vibration analysis have been given.The hardware platform of hydrogen micro-sensor detection system based on the piezoelectric-sound-resonance cavity (PSRC) was constructed. The drive circuit of the sensor and signal detection circuit was designed according to the working principle of the sensor. Processing unit with the ADSP-BF531 as the core was confirmed. The design of the ADSP-BF531 minimum system was proposed. The circuit schematic diagram and physical map has been given.The software of hydrogen micro-senso