基于pdms纳米光栅工艺分析-process analysis based on pdms nano grating.docxVIP

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基于pdms纳米光栅工艺分析-process analysis based on pdms nano grating.docx

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基于pdms纳米光栅工艺分析-process analysis based on pdms nano grating

Research of Nano-Grating Fabrication Based on PDMSAbstractAs a very important optical component,grating is widely used in the field of integrated o ptical circuit, optical communications, optical interconnects, optical information processing, o ptical measurement,etc. . At present, the application of the grating are concentrated at the nan ometer scale.Therefore,the study on nano-grating fabrication has a very important significanc e.Currently, the method of nano-grating production varies. However, existing nano-grating processing, such as holographic lithography, electron beam lithography, ion beam lithograph y, X-ray lithography etc., always require expensive equipment, complex and difficult controli ng, harsh processing conditions,and long cycle.The femtosecond laser direct writing, dual-bea m interference method can be also used to produce the grating with a period of a few hundred nanometers.But it is hard to obtain a satisfactory straightness using these methods.At the same time,they also demand complex optical circuits and precise controling.To solve these problems, this paper presents a novel nanoscale grating processing. First, a micronscale grating is fabricated using conventional photolithographic methods.Then moldi ng it with PDMS and stretching the PDMS membrane along the direction of the grating lines t o reduce the period of grating.And transfer the grating pattern from the PDMS membrane to P MMA.Nano-grating can be obtained by repeating the steps for sevaral times.The grating has b een tested and performs well.Using this method,nano-grating can be processing with low cost and short cycle.The pro cess is simple and easy to control,particularly suitable for the production of a large area of the grating structure.Key words: PDMS, Nano-grating, PMMA, Grating constant目录1 绪论 ............................................................................................................... 11.1 课题研究背景及意义 .........................................................