基于表面等离子体的光学聚焦器件分析-analysis of optical focusing device based on surface plasma.docxVIP

AbstractWiththedevelopmentofmodernscienceandtechnology,therequirementfrom life,industrial,defenseandotherfieldsarecallingtheimprovingoftheperformance andthedecreasingofthesizeofcomponents.ThesizeoftheLargeScaleIntegrated circuitandsomepartsofthemicroandnanodeviceshasreachedthenanometer scale,andthesizeofthedevicesisstilldevelopingtowardsaconstantlydownsizing trend.With theincreasing demands onthesizeofthedevice,thedifficultyof processingandmanufacturingcostisalsorising.An opticalfocusingdeviceis purposedtodesignforsubwavelengthfocusing,balancingthefocalperformance andthedifficultyofprocessing.Inthispaper,asubwavelengthfocusingdeviceisdesignedtofacilitate industrialproduction.Thisdesignusesthedelaythephaseofthesurfaceplasmon resonanceeffectsinasubwavelengthmetalslitandtheextraordinaryoptical transmissioneffectofthemetalfilmforlight.Thedesignofmultilayeraperiodicmetalgratingcanachieveanypositionofquasi-farfieldfocusing，andthe maximumdepth-to-width-ratioisacceptable.Withuseofthefinitedifferencetimedomainmethod(FDTD)fornumerical simulation,itisdemonstratedthatthetransversemagneticmode650nmincident lightfocusedahotspotinsubwavelengthscalethroughthedevice.Inthedesignof thisdevice,themaximumdepth-to-widthratiorequirementofthedeviceissmaller than10:1,andtheminimumlinewidthofslitsis20nm.Inthispaper,oflayersof metalgratingissimulatedwhenprocessingthegrating,obtainingthatthisstructure notonlyhasthecharacteristicsoflowaspectratiorequirements,butalsoisnot sensitive totheerrorsofthealignment.Therequirementofprocessingcanbe metbythemainstreamprocessingtechnologylevel.Inthispaper,aGrating-Fresnelhybridlenswith band-passfunctionisalso introduced.Itachievesalongfocaldepth,super-resolutionfocusingpointfor incidentlightwithwavelengthof500nmatthesametime.Meanwhile,itscattersthe lightthatisnotintheworkband.Thesubwavelengthfocusingdevicesdesignedin thispaperhasgreatapplicationprospectsinlaserdirectwriting,datastorage,and opticalprobe.Keywords:subwavelengthfocusing,SurfacePlasmonPolariton,