基于叉指电极的mems环境监测传感器关键技术分析-key technology analysis of mems environment monitoring sensor based on interdigital electrode.docx

优秀毕业论文 精品参考文献资料 Abstract MEMS sensor attracts attention for its simple structure, good stability, high reliability, and low cost. It was used in the environmental monitoring to detect biochemical substances in gas or aquatic environment, and had become hot spots in the field of environmental monitoring. In this paper, a MEMS biochemical sensor based on the interdigital electrode structure is studied systematically, including the work principle, structural optimization, fabrication process, testing and application. The results are shown as follows: The work principle of the interdigital electrode sensor was introduced. Against the low level biochemical substance was difficult to detect, MEMS biochemical sensor based on the interdigital electrode is supplied. The resistance model and design parameter was studied, and the influences of parameter s on interdigital electrode sensor were analyzed by optimum design. The performance of interdigital electrode sensor was optimized. Compared with other MEMS processing techniques, wet etching process is selected to fabricate the interdigital electrode sensor, and the fabrication processing was designed. The plating of chrome/gold electrode metal layer, wet etching of interdigital electrode were studied. The influences of parameters on manufacturing are analyzed, and the parameters in each process are determined by optimization. The interdigital electrode microstructure was completed. The design and fabrication of the interdigital electrode gas sensors was completed. The selecting of electrode structure, the design of process, the preparation of gas-sensitive material, the drawing of sensor layout was studied. The interdigital electrode gas sensor was completed and tested, and the practicability was proved. The design and fabrication of the interdigital electrodes Escherichia coli sensor was completed. The Escherichia coli biosensor based on the interdigital electrode was introduced. The Escherichia coli was modified on the sur