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Self-consistent kinetic model of low-pressure - flowing discharges: II. Surface processes
and densities of N, H, species
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1998 Plasma Sources Sci. Technol. 7 379
(/0963-0252/7/3/016)
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Plasma Sources Sci. Technol. 7 (1998) 379–388. Printed in the UK PII: S0963-0252(98)95104-0
Self-consistent kinetic model of
low-pressure N2–H2 flowing
discharges: II. Surface processes and
densities of N, H, NH3 species
B Gordiets, C M Ferreira, M J Pinheiro and A Ricard
´
Centro de Fısica de Plasmas, Instituto Superior Tecnico, 1096 Lisboa Codex,
´
Portugal
´ ´
CPAT, Universite Paul Sabatier, 31062 Toulouse Cedex, France
Received 3 February 1998, in final form 27 May 1998
Abstract. This work is the second of two companion papers devoted to the kinetic
modelling of low-pressure DC flowing discharges in N2–H2 mixtures. While the first
paper was mainly concerned with bulk discharge processes, the present one
investigates surface processes involving dissociated N and H atoms, which are
essential to understand the discharge properties. The kinetic model for surface
processes developed here takes into account: (a) physical adsorption and
desorption of N and H atoms; (b) chemical adsorption and desorption of both types
of atoms at vaca
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