集成角度传感器的moems扫描微镜分析-mo ems scanning micromirror analysis of integrated angle sensor.docx

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集成角度传感器的moems扫描微镜分析-mo ems scanning micromirror analysis of integrated angle sensor.docx

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集成角度传感器的moems扫描微镜分析-mo ems scanning micromirror analysis of integrated angle sensor

Study on the driving and control circuit of the mirror. Design of signal producing module, angle detecting module, feedback control module and variable gain amplifier module are conducted, respectively. Then the driving control circuit is built and debugged.Study on a function testing approach of the micromirror, and the testing platform is established. The resonant frequency, scanning angle of the micromirror, sensitivity and resolution of the angle sensor are tested. Results show that resonant frequency and quality factor of the MOEMS with reflected area of 5×6mm2 are 543.22Hz and 180.8, respectively; when the driving voltage is 0.65Vrms, the scanning angle of the mirror achieves ±12.3°; the sensitivity and resolution of the mirror are 0.35V/° and 0.5, respectively.Keywords: MOEMS, micromirrors, angle sensor, feedback control目录中文摘要..........................................................................................................................................I英文摘要........................................................................................................................................ II1 绪论......................................................................................................................................... 11.1 引言 ........................................................................................................................................... 11.2 MOEMS 扫描微镜国内外研究现状31.2.1 静电式扫描微镜 ................................................................................................................ 31.2.2 电热式扫描微镜 ................................................................................................................ 41.2.3 压电式扫描微镜 ................................................................................................................ 61.2.4 电磁式扫描微镜 ................................................................................................................ 71.3 论文的研究意义及主要内容 ..............................