激光能量对脉冲激光沉积法制备ZnO薄膜性能的影响_贾芳.docVIP

------------------------------------------------------------------------------------------------ —————————————————————————————————————— 激光能量对脉冲激光沉积法制备ZnO薄膜性能的影响_贾芳 第32卷 第4期 2009年8月电子器件ChineseJournalOfElectronDevices Vol.32 No.4Aug.2009 EffectofLaserEnergyonthePropertiesofZnOFilms *byPulsedLaserDepositionMethod JIAFang1,2,CAOPeijiang1,2,ZENGYuxiang1,2 11DepartmentofMaterialScienceandEngineering,ShenzhenUniversity,Shenzhen,Guangdong518060,China 21ShenzhenKeyLaboratoryofSpecialFunctionalMaterials,ShenzhenUniversity,ShenzhenGuangdong518060,China Abstract:Pulsedlaserd