(位移传感器专业英语）Nanometrology4培训资料.pptVIP

Team Member Yanlong MAO Xiaomin LIU Jiahao HUO Yulin Zhao Fei WU Yongbin YANG  Qingdong SUN Atomic Force Microscopy Atomic Force Microscopy is the most common of the SPM techniques, diffusely applied in a wide range of research as well as industrial fields. The surface is probed through a sharp tip, located at the free end of a cantilever that is 100 to 400μm long. This tip is some microns long, with a curvature at the very end that is often less than 10nm; high force sensitivities (between 10-7 and 10-12 N) make possible the measurement of a single, chemical bond-breaking force. Having an appropriately sized tip is important for acquiring real surface features and atomic resolutions, but advancements in piezoelectric transducers (PZT) are responsible for enabling SPMs to probe a surface with sub-?ngstrom precision. As the tip is scanned over the sample, or the sample is scanned under the tip forces between the tip and the sample surface cause spatial deflections and oscillations of the cantilever. Optical lever AFM The key information gathered in AFM comes with measuring those deflections, quantified by means of an optical lever system, coupled with position sensitive a photodiode. The probe tip is shown in contact with the sample surface: during scanning, as z-displacements cause cantilever flexions, the light from the laser is reflected onto the split photodiode. Modes Two distance regimes are put in evidence : - the violet colored zone, below the distance of minimum energy (1 nm), where the interatomic force between the tip and sample is repulsive; - the green colored zone, above the distance of minimum energy (about 1-30 nm), where the interatomic force between the tip and sample is attractive. Polymers and coatings Large Range AFM scan of a triple weld line: in the zoom box a single profile is plotted. Measurements and results AFM measurement of the fiber section. Different scans were performed using an Atomic Force Microscope(AFM) at di