微驱动器的发展与研究应用-ok.docVIP

江 西 理 工 大 学 南 昌 校 区毕 业 设 计（论文）题 目：微驱动器的发展和研究应用系 ：机电工程系专 业：机电一体化技术班 级：08级机电三班学 生：张小营学 号导教师：刘德生 职称：中级 PAGE I摘 要微电子机械系统 ( Micro Electro Mechanical Systems, 简称 MEMS ) 是在微电子技术的基础上兴起的一门应用技术, 微驱动器是 MEMS的重要组成部分。首先阐述了几种驱动原理：电磁驱动、静电驱动、压电驱动、形状记忆合金驱动、热驱动等及其当前研究成果，接下来介绍几种新型驱动：机械化学驱动、 渗透驱动、生物能源驱动、仿生驱动、光致伸缩驱动。总结了常用微驱动器的驱动方式及特征及其分类应用。概括了微驱动器的研究现状，提出了目前研究中存在的主要问题,在此基础上简要分析了微驱动器的发展前景。关键词：微驱动器；微电子机械系统(MEMS)；驱动原理；驱动方式ABSTRACTMEMS (Micro Electro Mechanical Systems, referred to as MEMS) technology in the microelectronics the rise of a based on the application of technology, micro-drive is an important part of MEMS. Several driving principles first expounded: electromagnetic drive, electrostatic actuation, piezoelectric actuator, shape memory alloy driver, hot drive so its current research, then introduces several new types of drive: mechanical and chemical drive, infiltration driven, bio-energy drive Bionic drive, light-induced expansion drive. Summarizes the common micro-drive and the drive characteristics and classification applications. Summarizes the research of micro drives the present situation of the current study, the main problems, on this basis, a brief analysis of prospects for the development of micro drives.Key words：Micro actuators；Micro electro mechanical systems(MEMS)；Actuating principle；Actuating modes 目 录摘 要 HYPERLINK \l _Toc287397762 PAGEREF _Toc287561180 \h IAbstract HYPERLINK \l _Toc287397763 PAGEREF _Toc287561181 \h II目 录 HYPERLINK \l _Toc287397764 PAGEREF _Toc287561182 \h III TOC \o 1-3 \h \z \u HYPERLINK \l _Toc287397760 第一章 绪 论 PAGEREF _Toc287397760 \h 1 HYPERLINK \l _Toc287397761 第二章 微驱动器的驱动原理 2 HYPERLINK \l _Toc287397762 2.1 电磁驱动 2 HYPERLINK \l _Toc287397763 2.2 静电驱动 3 HYPERLINK \l _Toc287397764 2.3 压电驱动 3 HYPERLINK \l _Toc287397765 2.4 形状记忆合金驱动 4 HYPERLINK \l _Toc287397766 2.5 热力驱动 4 HYPERLINK \l _Toc28739776