同质量液体以球形表面积最小11429.pptVIP

淘宝才智在线QQ754093490才智在线 “Induced-Charge Electro-osmosis” Review of Dielectrophoresis (DEP) Date: 2007/10/17 * 淘宝才智在线QQ754093490才智在线 Repositionable Liquid Micro-Lenses With Variable Focal Length (1’st presentation) Institute : 奈微所 Name : 楊志誠 Student ID : d9635804 淘宝才智在线QQ754093490才智在线 Outline Introduction Theory Design and Fabrication Experimental Results Conclusion [MIT John W. M. Bush (April 2004).] 同質量的液體以球形的表面積最小 因此水珠通常以球形式存在 這樣才符合自由能最小化的自然法則 淘宝才智在线QQ754093490才智在线 Surface Tension Weight scales as L3 and surface tension scales as L1 Hence weight decreases more rapidly than surface tension Hence insects can walk on water and coins can float on water Introduction 淘宝才智在线QQ754093490才智在线 Micro-fludic Transfer Electro-Wetting 電 潤 濕 Electro-Osmosis 電 滲 Dielectrophorsis 介電泳 Capillary 毛細效應 Pressure Gradient Electric-Field Centrifugal Force Magnetic Method of Microfludic Transfer 淘宝才智在线QQ754093490才智在线 電 滲 Electro-osmosis 介 電 泳 Dielectrophoresis (DEP) 電 潤 濕 (Electro-wetting) - No moving parts - Theory 淘宝才智在线QQ754093490才智在线 ε 為真空中的介電係數 εr為介電材料的電介質 t 為介電材料的厚度 r 為 表面張力 Theory (Electro-Wetting) : Lippmann-Young Equation(1875) 低消耗功率及高速之微流體/液滴系統計與作分析 國家科學委員會補助專題研究計畫 NSC91－2218－E－007－043－ 淘宝才智在线QQ754093490才智在线 Paper Contribution : 1.None of old approaches have allowed lateral lens with high accuracy positioning 2.Lens diameter : 700μm Electrodes width : 100 μm Positioning accuracy : 100μm 淘宝才智在线QQ754093490才智在线 Design and Fabrication Process Flow : a) Photo-resist structure starting 525μm thickness by HF etching b) The grooves are filled with ITO using lift-off c) The system covered with 800nm SiO2 layer d) The barrier grid is etched into SiO2 e) The droplet contact is sputtered onto the wafer usi