钛酸锶钡薄膜介电非线性特性分析-analysis of dielectric nonlinear characteristics of barium strontium titanate thin films.docx

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2018-08-07 发布于上海
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钛酸锶钡薄膜介电非线性特性分析-analysis of dielectric nonlinear characteristics of barium strontium titanate thin films.docx

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钛酸锶钡薄膜介电非线性特性分析-analysis of dielectric nonlinear characteristics of barium strontium titanate thin films

ABSTRACTABSTRACTInordertofindpathforimprovingandoptimizingthedielectricnonlinearityofBa1-xSrxTiO3(where1x0，shortenednameBST)thinfilms,someimportantfactorsinboththetwoaspects,interfacetranslationlayersandBSTlayer,(forexamples:thickness,dielectricconstant,andconductivityofinterfacetranslationlayers,BSTlayerthickness,averagegrainsize,grain-boundaryshapeandsoon),werestudiedinthisthesis,bypreparing,testingandanalyzingBSTthinfilms.Someworkasfollowsisfinished:Usingthemodelofflatcapacitorwiththreedifferentdielectriclayers,therelationshipbetweenelectric-fieldintensityineachlayerandtimeafteroutsidevoltageappliedwascomputedandsimulated.Itisfoundthatthenagtiveeffectsofinterfacetranslationlayersbacomemoreobviousinhigherfrequency.TherelationshipbetweenBSTlayerthicknessandthemeasuredrealpartofrelativedielectricconstantoftheBSTcapacitorwasstudied,andseveralpossiblemechanicsofBSTlayerthicknesseffectingthemeasuredrealpartofrelativedielectricconstantwereanalyzed.UndertheassumptionthataveragegrainsizeintheBSTlayerisaconstant,themainmechanicsoffilmthicknesseffectingthemeasuredrealpartofrelativedielectricconstantisthatthevolumepercentageoftheinterfacetranslationlayerdecreaseswithincreasingfilmthickness.TherelationshipbetweenaveragegrainsizeandthemeasuredrealpartofrelativedielectricconstantoftheBSTcapacitorwasstudied,andseveralpossiblemechanicsofaveragegrainsizeeffectingthemeasuredrealpartofrelativedielectricconstantwereanalyzed.UndertheassumptionthateachgrainsizeintheBSTlayerissingledomainparticleanddoesnotcontacteachother,themainmechanicsofaveragegrainsizeeffectingthemeasuredrealpartofrelativedielectricconstantoftheBSTcapacitoristhatthevolumepercentageoftheamorphoussubstancedecreasewithincreasinggrainsize.Somephenomenarelatedtoferroelectrichysteresisloopandbutterflyloop,suchas,theasymmetryphenomenaofC-Vcurves,thehorizontalshiftofC-VcurvesandABSTRACTferroelectrichysteresisloops,theverticalshiftofferroelectrichysteresisloops,andtheshapechangesofferroelectrichysteresisloops,wereanalyzed,ex