Si含量对TiAlSiN纳米复合涂层微观结构和力学性能影响.docVIP

Si含量对TiAlSiN纳米复合涂层微观结构和力学性能影响 　　基金项目： 上海市自然科学基金项目(11ZR1424600);上海市教委重点学科项目(J50503) 　　作者简介： 李伟(1981-),男,副教授,硕士生导师,主要从事功能薄膜材料的研究和开发. 　　摘要： 采用不同Si含量的TiAlSi复合靶,在Si基底片上用射频磁控溅射工艺沉积了TiAlSiN纳米复合涂层,采用X射线衍射仪(XRD)、高分辨透射电子显微镜(HRTEM)和纳米压痕技术研究了Si含量对TiAlSiN涂层的微观结构和力学性能的影响.结果表明:TiAlSiN涂层内部形成了Si3N4界面相包裹TiAlN纳米等轴晶粒的纳米复合结构.随着Si含量的增加,TiAlSiN涂层的结晶程度先增加后降低,涂层内部的晶粒尺寸先减小后趋于平稳,涂层的力学性能先升高后降低.当Si与TiAl原子比为3∶22时获得的最高硬度和弹性模量分别为37.1 GPa和357.3 GPa. 　　关键词： TiAlSiN纳米复合涂层; Si含量; 微观结构; 力学性能 　　中图分类号： TG 174.4文献标志码： A 　　Influence of Si Content on Microstructure and Mechanical 　　Properties of TiAlSiN Nanocomposite Coatings 　　LI Wei, ZHAO Yong??sheng, LIU Ping, MA Feng??cang, LIU Xin??kuan, 　　CHEN Xiao??hong, HE Dai??hua, WANG Bei??bei, KANG Yi??wei 　　(School of Mechanical Engineering, University of Shanghai for 　　Science and Technology, Shanghai 200093, China) 　　Abstract： Using TiAlSi targets with different Si contents,TiAlSiN nanocomposite coatings were deposited in Si substrate by R.F. magnetron sputtering.By means of X??ray diffraction(XRD),high resolution transmission electron microscopy(HRTEM) and nano??indentation techniques,the influences of Si content on microstructure and mechanical properties of TiAlSiN nanocomposite coatingswere investigated.The results show that the nanocomposite structure with TiAlN nanocrystallites surrounded by Si3N4 interfacial phase formed within the TiAlSiN coating.With the increase of Si content,the crystallization degree of TiAlSiN coating first increased and then decreased,grain size of the coatings firstdecreased and then kept stable,the mechanical properties of the coatings first improvedand then reduced.When the ratio of Si(atom%) and TiAl(atom%) constituents was 3∶22,the maximum hardness and elastic modulus could respectively reach 37.1 GPa and 357.3 GPa. 　　Key words： TiAlSiN nanocompositecoating; Si content; microstructure; mechanical property 　　0前言 　　随着切削加工条件的不断提高,以高速度、高精度、高效以及环保为追求目标的切削加工对刀具涂层提出了更高的服役要求.为了满足这一需求,研究者们尝试在二元涂层的基础上添加新的元素,以制备出三元以及四元