ZnO掺杂TiO2厚膜的sol-gel法制备及气敏特性研究-微电子学与固体电子学专业论文.docxVIP

Zn ZnO 掺杂 TiO2 厚膜的 sol-gel 法制备及气敏特性研究 河北工业大学硕士学位论文 河北工业大学硕士学位论文 PAGE PAGE iv INVESTIGATION ON GAS SENSING PROPERTIES OF ZnO-DOPED TiO2 THICK FILMS PREPARED BY SOL-GEL METHOD ABSTRACT TiO2 is width offorbidden band N-type metal-oxide semiconductor materials,forbidden band width is 3.2eV,grain size is between 1-100nm.The particle size of nanostructure TiO2 gas sensor materials is small,the specific surface area is large, the impedance variations is large,the sensitivity of TiO2 gas sensors has improved,and the performance of gas sensors has improved, it has a important application prospect in all kinds of sensors, solar battery,photocatalytic environmental monitoring and other fields.At present, the performance of the gas sensors development trend is:improve the sensitivity and stability,lower the power consumption and cost,and to decrease the size. Using the sol-gel method to prepare TiO2, using the alcohol-condensation of Ti(OC4H9)4 and CH3CH2OH to prepare the nanostructure TiO2 colloid, the pure TiO2,2wt%ZnO-TiO2, 4wt%ZnO-TiO2 and 6wt%ZnO-TiO2 were prepared through the best doping theory,and did the treatment of 500℃,700℃,900℃ annealing temperature in the muffle furnace, the things phase structure and surface microstructure were analysed and researched through the the detection means of XRD and SEM.The preparation of nanometer powder would be spreaded on the Al2O3 ceramics tube by the coating method,and the hot air sensitive components were prepared. The gas sensor characteristics of the different gas were test through the gas-sensitive element test system,the doping amount of the ZnO and the annealing temperature to the sensitivity, selective and response-recovery time of the TiO2 gas sensor have been studied. The results indicate that: the grain size decrease with the increase of content of ZnO, and the grain size became smaller when the ZnO doped,the grain size of ZnO-TiO2 with w(ZnO)=4wt% is 15.9nm at the annealing temperature of 700