发射光谱诊断实习.pdfVIP

Nonthermal Plasma Diagnostics Summer School (NPDS2 2013) plasmalab.kaist.ac.kr 2013. 8. 20 崔 元 滈 (CHOE Wonho) 韓國科學機術院 (KAIST) 物理學科 (Physics) 氣體放電物理硏究室 (Gas Discharge Physics Lab) Application of low temperature plasmas Synthesis decomposition Greenhouse gas treatment Catalysis Toxic material sterilization Thin film coating Environment Waste treatment Powder material Chemical processing Semicond. PECVD Display Etching Plasma polymerization Low temp Plasma display Thin film Conducting polymer plasma Composite membrane (Low pressure+Atm pressure) Nano-powder Polymer Medical engineering Contact lens Anti-corrosion Metal Artificial organs Anti-wear DNA synthesis Surface modification Plasma source Plasma diagnostics Plasma application 2 Operation parameters - plasma parameters in non-thermal plasmas Operation parameters Plasma parameters Gas composition Specific radical and excited species density Gas flow rate Gas temperature and radical production rate Gas pressure Radical density Input power Gas temperature, electron density, radical density EEDF, radical density, ion collis