原子水平薄膜生长机制模拟.pptVIP

Computer Simulation of Thin Film Growth at atomic level INTRODUCTION WHY investigation at atomic level? Film growth is a non-equilibrium thermal-dynamics process. The mechanism at atom level dominates the film growth mode and the quality of thin films. Film growth involves in many atomistic processes, such as surface diffusion, nucleation, aggregation, coarsening, and chemical reaction. Surface processes have a very wide time spectrum. These range from pico-seconds to seconds. INTRODUCTION HOW to study at atomic level? EXPERIMENTAL METHODS STM, AFM, HREM, etc. FUNDAMENTAL THEORY To devel