多晶硅CVD反应器的计算传递学-化学工程专业论文.docx

i iii theoretical model. The simulation results demonstrate that the flow pattern of the gas mixture in the novel reactor is nearly plug flow, which is fundamentally different from that of traditional reactor, and the temperature field can be controlled by changing the operating parameters in the novel reactor. Because the temperature of the gas phase in the novel reactor can be controlled, the chance of silicon powder generation can be avoided, and the cleanness of the inner wall of the reactor can be kept at 95% above. Simulation results shows that the energy consumption of the novel reactor can be greatly reduced due to lower radiation on the cleaner inner wall. Finally, the paper presents a novel cooling structure of the chassis in polysilicon CVD reactor, the flow behavior in the novel chassis has been modeled by using the computational fluid dynamic. The simulation result demonstrate that by reducing the size of the electrode sleeve and the distance between the electrode sleeve and the bottom plane of the chassis can increase the uniform of the mass flow between the electrode sleeves; changing the distance between the middle plane and the bottom plane in the chassis can also increase the uniform of the mass flow between the electrode sleeves. Key word: Novel; Polysilicon; CVD; Computational Transport; S2S i i 目 录 HYPERLINK \l _bookmark0 第一章 文献综述 1 HYPERLINK \l _bookmark1 1.1 多晶硅的概述及应用1 HYPERLINK \l _bookmark2 1.2 国内外多晶硅产业的发展3 HYPERLINK \l _bookmark3 1.3 多晶硅制备技术5 HYPERLINK \l _bookmark4 1.3.1 改良西门子法5 HYPERLINK \l _bookmark5 1.3.2 硅烷法6 HYPERLINK \l _bookmark6 1.3.3 冶金法7 HYPERLINK \l _bookmark7 1.3.4 流化床法7 HYPERLINK \l _bookmark8 1.3.5 汽-液沉积法8 HYPERLINK \l _bookmark9 1.3.6 铝热还原法8 HYPERLINK \l _bookmark10 1.3.7 区域熔化提纯法8 HYPERLINK \l _bookmark11 1.3.8 常压碘化学气相传输净化法8 HYPERLINK \l _bookmark12 1.3.9 无氯技术9 HYPERLINK \l _bookmark13 1.4 多晶硅 CVD 反应器的研究发展 9 HYPERLINK \l _bookmark14 1.5 计算传递学的研究发展 11 HYPERLINK \l _bookmark15 1.5.1 计算流体力学的研究进展 11 HYPERLINK \