二氧化碳激光器机械调Q的分析-光学工程专业论文.docx

华 中 科 技 大 学 硕 士 学 位 论 文 Abstract In the history of laser technology, the development of Q-switched technology is important. The technology of Q-switch has promoted the nonlinear optical developing through the interaction between Q-switched pulses and materials. Q-switched technology also made great developments of laser rangefinder, lidar, high-speed photography holographic and so on. So lots of attentions were focused on Q-switched technology. In this thesis, the mechanical Q-switched CO2 laser output characteristics were studied and some research work were carried out on laser resonator experimentally and theoretically. Firstly, the thesis introduced some investigations on Q-switched technology. Then a mechanical Q-switched CO2 laser was designed according to the requirements o f EUV （extreme ultraviolet） project. In this study, the influences of rated power, laser repetition frequency, chopper incision width of the film, and other parameters on properties of the mechanical Q-switched CO2 laser, such as output pulse waveform, average power, pulse width and peak power, were investigated in detail in order to obtain a perfect mechanical Q-switched CO2 laser. From the calculated results of the stability of the resonator cavity, it can be concluded that the resonator cavity we used was stable. Based on the calculated results of the Beam Spot of the laser in the cavity, the parameters of the cavity were obtained, meeting the requirements of EUV project. And a laser with the peak power 40kw, pulse width of about 250ns was obtained. The results we obtained in the study of the mechanical Q-switched CO2 laser can be referred and applied for next investigations on electro-optical Q-switched CO2 laser of the project. Key words : CO2 laser Mechanical Q-switch The stability of the resonator Spot calculation 华 中 科 技 大 学 硕 士 学 位 论 文 目 录 摘 要.......................................................................................................... I Abstract .................