各向异性周期性结构RCWA算法及并行计算加速-电子与通信工程专业论文.docx

摘要 摘要 I I 摘 要 严格耦合波分析法（RCWA）是一种非迭代的能稳定收敛的状态变量解法,是 周期结构衍射模拟分析中应用最广的傅立叶空间的方法，这种方法非常适合于对 亚波长量级的周期结构进行衍射模拟分析。但是 RCWA 算法仍然存在对折射率剧 烈变化的周期结构数值计算收敛慢的问题。 本文基于衍射光栅的严格耦合波分析法，把光栅介质从各向同性的情形推广 到各向异性情形。从各向异性衍射区域中电磁场傅立叶级数展开和介电常数张量 的傅立叶级数展开出发，利用周期性边界条件和电磁波的横波性等特性，把求解 矢量麦克斯韦方程组问题转换为求解矩阵特征值问题，从而求出电磁场的衍射效 率，清晰明了的展示了各向异性光栅严格耦合波方法的推导过程。并以 LiNbO3 晶 体为例，在光轴与坐标重合情形下，改变入射光波长、入射角等光栅参数讨论体 光栅和表面浮雕光栅的衍射特性。 收敛速度和计算效率问题一直是严格耦合波法的焦点问题，研究人员一直在 寻找计算方法来提高收敛速度和数值稳定性，本文将并行计算技术应用到 RCWA 算法计算效率的改进上来。LU 分解和 QR 分解是 RCWA 算法中使用频率非常高 并且非常耗时的模块，用 NVIDIA 公司的 CUDA 混合计算架构对这两部分进行优 化，采取的策略包括制定合适的并行计算算法，利用分块技术和共享内存技术， 利用 CUDA GPU 具有高并行、多线程、计算能力强、带宽高的优良特性，提高 RCWA 模拟技术的计算效率。 最后，简要的介绍了 RCWA 在光折变晶体和动态极化铌酸锂晶体分析中应用， 以 PPLN 晶体衍射效率随光波长的变化规律为例，分析 PPLN 晶体的波长选择性。 关键词：严格耦合波分析，各向异性，周期性结构， CUDA 混合架构，PPLN ABSTR ABSTRACT II II ABSTRACT Rigorous Coupled Wave Analysis is a non-iterative, deterministic technique utilizing a state-variable method that converges to the proper solution. It is a method widely used in diffraction of periodic structures in frequency domain. This method is natural suitable for modeling the different kinds of grating with the scale of wavelength. But it will may still coverage slowly when it is used to analyze the gratings with high contrast refractive index. Revealed by the Rigorous Coupled Wave Analysis in diffraction grating theory, a thorough and systematic research has been accomplished to cover the diffraction properties of periodic structures made of anisotropic medium. Firstly, the electromagnetic field is expressed as a Fourier expansion and the permittivity tensor of the grating region is expanded into a series of Fourier harmonics. Then boundary condition and condition of transversality of electromagnetic are applied. The problems solving the Maxwells equations are transformed to the Algebraic problems of Matrices’ Eigen solutions. We can get the diffraction properties what we want such as transmission, reflection and field distribution. The processes of the establishment of the rigorous coupled wave