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基于SOI脊型波导的跑道型谐振腔电光调制器-测试计量技术及仪器专业论文
resonator were analyzed, based on which the optical structures were designed. The conductive mechanism of the P-I-N junction and the plasma dispersion effect were analyzed, thus, the interrelation between the carrier concentration changes and refractive index coefficient changes was confirmed. The electrical structure parameters of modulator were determined after the I-V characteristic of the P-I-N junction was simulated via Silvico TCAD software. Utilizing the MEMS process, the integral device of electro-optical modulator based on SOI rib waveguide race-track resonator was fabricated with the designed parameters. After the testing, it is demonstrated that the race-track resonator and the modulator based on performance well. With further analyzing, it is obvious that the mode splitting characteristic of the race-track resonator can be detected and it indeed promotes the performances of the modulator effectively, such as extinction ratio, modulation depth and rate. More specific, when the modulation frequency is 1MHz, the extinction ratio is 6.99 dB, the modulation depth is 80%, rising time is 29ns and falling time is 67ns for race-track resonator modulator, while the extinction ratio is 1.52 dB, the modulation depth is 36%, rising time is 41ns and falling time is 72ns for ring resonator modulator. The experiment results indicate that the mode splitting of the race-track resonator is beneficial to the modulator as well as other applications of the optical resonators and provides a new idea for the design, although the modulator did not performance ideally.
Keywords:SOI, Rib waveguide, Race-track resonator, Mode splitting characteristic,
Electro-optical modulator
目 录
HYPERLINK \l _bookmark0 第一章 绪 论 ····················································································································1 HYPERLINK \l _bookmark1 1.1 本课题研究的背景 ······························································································1
HYPERLINK \l _bookm
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