基于pdms的自组装及转移印刷制备微结构的研究-机械制造及其自动化专业论文.docxVIP

Classified Index：TG501.1 U.D.C.：621.94 Dissertation for the Doctoral Degree in Engineering RESEARCH OF MICROSTRUCTURES FABRICATED BY SELF-ASSEMBLY AND TRANSFER PRINTING BASED ON PDMS Candidate: Supervisor: Academic Degree Applied for: Speciality: Affiliation: Date of Defence: Degree-Conferring-Institution: Zhao Xiaoli Prof. Dong Shen Doctor of Engineering Mechanical Manufacturing and Automation College of Mechatronics Engineering December, 2007 Harbin Institute of technology 摘 要 摘 要 - - I - 摘 要 随着科学技术的发展，器件微型化成为目前诸多领域的关注重点。作为 传统微结构加工技术的光刻技术，能够加工微纳米级特征尺寸的大规模集成 电路，在工业生产和科学研究中得到广泛应用。然而光刻技术需要昂贵