激光对CCD和CMOS图像传感器损伤阈值研究.PDFVIP

第27卷第6期 红外 与毫米 波学报 Vo1．27，No．6 2008年12月 J．Infrared Millim．Waves December，2008 文章编号：1001—9014(2008)06～0475—04 激光对CCD及CMOS图像传感器的损伤阈值研究 林均仰， 舒 嵘， 黄庚华， 方抗美， 闫志新 (中国科学院上海技术物理研究所，上海 200083) 摘要：针对激光对CCD及CMOS图像传感器的干扰损伤进行了理论分析和实验研究．实验测量出常压及真空条件 下1064rim激光对CCD及CMOS图像传感器的干扰阈值、损伤阂值及完全损坏阈值．实验结果表明，CCD或CMOS 图像传感器的各种阈值在常压和真空两种不同条件下的差别不明显．实验结果还显示，无论在常压还是在真空条 件下，CCD比CMOS更容易受到激光的干扰和损伤甚至严重损坏；而CMOS相机具有很好的抗干扰和抗损伤能力． 关 键 词：激光干扰；CCD图像传感器；CMOS传感器；损伤阈值；激光 中图分类号：TN958．98 文献标识码：A STUDY oN THRESHoLD oF LASER DAMAGE To CCD AND CMOS IMAGE SENSORS LIN Jun-Yang， SHU Rong， HUANG Geng—Hua， FANG Kang—Mei， YAN Zhi—Xin (Shanghai Institute of Technical Physics，Chinese Academy of Sciences，Shanghai 200083，China) Abstract： rheoretical analyses and experimental research were done on the laser．induced interference and damage to CCD and CMOS image sensors．The 1064nm laser interference threshold．damage threshold and completely destroy threshold of CCD and CMOS image sensors were measured under atmospheric pressure condition and vacuum condition respectively．Ex— perimental resuhs show that the three aforementioned thresholds of CCD or CMOS sensors have no obvious differences under the two different pressure conditions．Experimental results also reveal that，compared to CMOS image sensors，CCD image sensors are easier to be interfered or damaged or even destroyed．while CMOS sensors have a better anti-jamming and anti． iniury ability under each of the two conditions． Key words：laser interference；CCD image sensors；CMOS sensors；damage threshold；laser 使半导体材料电学参数的改变，热效应损坏探测器 引言 材料以及力学效应造成传感器结构的硬损伤等 J． 随着激光能量的不断提高及其应用范围的日益 影响器