cigs薄膜太阳能电池窗口层以及透明导电层的制备与研究电子与通信工程专业论文.docxVIP

内蒙古大学硕士学位论文PREPARATl0N 内蒙古大学硕士学位论文 PREPARATl0N AND STUDY 0F CIGS THIN FILM SOLAR CELL WINDOW LAYER AND TRANSR6心ENT CONDUCTIVE LAYER AB STRACT Owing to the outstanding electro—optical properties，CIGS thin-film solar cells have proven to be the most promising photovoltaic devices．Recently,its transparent conductive layer and window layer are studied intensively because of their impact on the performance of solar cells． ZnO window layer,A1 doped ZnO(AZO)transparent conductive layer,and ZnO／AZO bilayer was prepared by magnetron sputtering．To meet the requirement of CIGS thin—film solar cells，the influences of sputtering power,working pressure and other process parameters on electro—optical properties were discussed．The phase structure and surface morphology of the as-prepared films were measured by XRD and SEM．The composition of each chemical element was analysized EDAX．And the optical transmittance and resistivity were observed by UV-visible—near-infrared spectrophotometer and four-probe tester,respectively． The results indicate that ZnO and AZO thin films were along the(002)plane preferential growth，the transmittance between 400 nm to 1 400 nin has reached more than 85％．Their resistivity decreased significantly to 1 0一magnitude．The surface and cross—sectional morphology shows that ZnO and AZO grow well．The thickness of the ZnO and AZO are respectively 200nm and 600 nm．It is found that the optical， 万方数据 内蒙古大学硕士学位论文electrical 内蒙古大学硕士学位论文 electrical properties and thickness of bilayer film are close to the requirement of CIGS cells．The corresponding process pamameters are listed as follows．The working pressure is 1．6 Pa，sputtering power is 80 W sputtering time is 5 minutes for ZnO film，and 1．8 Pa，105 W，20 minutes for AZ0 film． KEYWORDS：CIGS thin film solar cell；ZnO window layer；AZO transparent conductive layer；magnetron sputtering 万方数据 内蒙古大学硕上学位论文目录 内蒙古大学硕上学位论文 目录 第一章绪论 ．1 1．1 CIGS薄膜太阳能电池概述 1 1．1．1引言 ．1 1．1．2 CIGS薄膜太阳能电池的结构及优点 2 1．1．3 CIGS薄膜太阳能电池的发展概况 2 1．2 CIGS薄