zno压电材料在mems器件中的应用研究机械设计及理论专业论文.docxVIP

摘要摘要 摘要 摘要 采用氧化锌压电薄膜制作的微悬臂梁，既可以作为微型执行器，也可以作为 微型传感器。采用氧化锌纳米棒制作的纳米谐振器，以其超小的体积与质量及超 低的功耗，可以具有超高的灵敏度。 研究氧化锌压电薄膜及纳米棒的机械特性是将之应用于工程实际的前提，本 论文着重从理论上研究微悬臂梁及纳米棒谐振器的功能特性，同时对压电薄膜及 纳米棒的实际制备进行了实验探索。 首先，对压电微悬臂梁进行了研究。分析了微悬臂梁受力以及加载电压的情 况，给出了压电微悬臂梁的力．电量、电压．位移的理论模型。在此基础上，利用 ANSYS有限元分析软件对压电微悬臂梁进行结构分析，分析了影响压电微悬臂 梁执行器性能的多种因素。其次，给出了氧化锌纳米棒谐振器的基本结构，对纳 米谐振器的模型进行了探索。研究了纳米棒谐振器的下拉电压，同时探讨了谐振 器的静电力和静电激励的关系。采用差频检测的方法，研究了输入电压对锁相放 大器采集到的电流的影响，为氧化锌纳米棒谐振器的设计及应用提供有价值的参 考依据。在实验研究上，采用S01．Gel技术制各ZnO压电薄膜，并通过XRD、 SEM等表征测试手段对ZnO压电薄膜的质量进行表征分析，进而对制备工艺进 行优化，以获得高质量的ZnO压电薄膜；采用水热法制备出了形态良好的氧化 锌纳米结构，所获得的ZnO纳米棒结构为氧化锌微纳米谐振器的研究应用提供 了实验基础。 关键词：MEMS；ZnO薄膜；谐振器；微悬臂梁 AbstraclAbstract Abstracl Abstract The micro-cantilever made of ZnO piezoelectric thin films c,an be used as micro-actuator and micro-sensor．Meanwhile，the ZnO nanobeams Can have a hi【gh sensitivity．To apply them into practical applications，their mechanical properties should be studied． This paper presents a theoretical study of micro-cantilever and nanobeam resonator．For the experiments，the preparation of ZnO piezoelectric thin films and ZnO nanobeams are explored．Firstly,the characteristics of the piezoelectric micro-cantilever are analyzed when it is loaded with force and electric field，and then the theoretical models of its voltage-displacement and force-power transformation are derived．Based on this，the ANSYS finite element analysis software is used to analyze the structure of piezoelectric cantilever in order to get the various factors that influence the performance of the actuator．Secondly,the basic structure of a ZnO nanobeam resonator is introduced and its theoretical model is studied．The pull·off voltage of nanobeam resonators is studied and the relationship between electrostatic force and electrostatic driving power source of resonator is discussed．By detecting the frequency difference in the phase lock loop，we can study how the input voltage influences the current collected by lock-in amplifier and this provides valuable information for the design an