三梁双膜耦合的静电谐振气压传感器研究机械电子工程专业论文.docxVIP

摘要原理样机。样机性能的综合测试结果表明：传感器量程为30．190 摘要 原理样机。样机性能的综合测试结果表明：传感器量程为30．190 kPa，基频为34 kHz左右，灵敏度可达30 Hz／kPa，补偿后满量程精度优于0．03％FS：65 min的 短期频率稳定在士0．15 Hz以内，55天的长期输出频率相对偏移量优于50 ppm。 传感器的输出精度已接近国际领先水平，在长期稳定测试方面有较大应用潜力。 关键词：谐振式气压传感器梁膜复合硅．玻璃多层键合Q值稳定性 万方数据 AbstractAbstract Abstract Abstract MEMS resonant baroceptors have been widely used in air data acquisition systems， meteorology，calibration，engine test，and oilgas exploitation because of its beuer accuracy and stability．The electrostatic resonant micro-baroceptor,one type of the resonant baroceptors，has gained sustained and extensive attention in academia and industry due to its simple structure，stable operation，and IC compatibility．In spite of lot of significant research results have been made on such micro—baroceptor in design and fabrication，improving works must be performed，e．g．，structure optimization for solving the contradictions between the stability and the high sensitivity of the sensoL reducing the out—of-plane displacement(OPD)of the resonator ulteriorly in order to obtain more stable output signal，decreasing the temperature drift of the sensor chip，developing of wafer level manufacturing process in order to realize the sensitive chip batch manufacturing with high Q factor．Around these problems，the systematic research in this paper is performed in theoretical analysis，structural optimization，wafer level manufacture and packaging，and testing． Based on the systematic analysis of the pressure-frequency conversion theory in the coupled structure of the diaphragms and the beams，this paper puts forward innovative electrostatic resonant baroceptor with symmetrical triple—beams and dual diaphragms．The triple-beams has an single main beam for pressure sensing and two vice beams for stabilizing resonant structure，and the stability of the combined beams is increased comparing with the single vibration beam．On the other hand，the pressure—stress conversion structure was designed with dual diaphragms symmetrically thrusting the mai