白光扫描干涉三维表面形貌测量技术的研究精密仪器及机械专业论文.docxVIP

白光扫描干涉三维表面形貌测量技术的研究摘要 白光扫描干涉三维表面形貌测量技术的研究 摘要 白光扫描干涉在三维表面形貌的检测中有着广阔的应用前景。本文在系统 地分析和总结了各种三维表面形貌测量方法，比较了各种方法的优缺点，重点 对使用白光扫描干涉法高精度测量三维表面形貌技术进行了研究。 组建了以Linnik干涉仪为基础的白光扫描干涉测量试验装置，为了得到条 纹，将参考臂用作测量臂，参考臂由PZT驱动器来驱动。用CCD摄像机来采集 干涉条纹，分析条纹特性以确定被测面的相对高度。对于影响试验结果准确性 的因素如PZT扫描间距和非线性、CCD成像质量和白光源波长扰动，我们做了 详细的研究。与表面精度相关的参数我们也对其校准方法做了一些论述。 为了用白光干涉法检测出三维表面形貌的高度值，建立了频域分析算法， 用于解调干涉条纹和消除相位不确定性。 最后，通过仿真方法验证了白光干涉频域分析算法，仿真结果表明该算法 可以有效地消除条纹解调时的相位不确定性。研究成果显示，扫描白光干涉法 可以实现大范围、高精度的测量。尤其在入射光方向，其测量精度可以达到纳 米级。 关键词：白光扫描干涉法 表面形貌PZT Ⅳ Research Research on Measuring 3D Su rface Topography Based on Scanning White-light Interferometry ABSTRACT Scanning white—light interferometry for 3D surface topography has a wide application． In this paper the methods of 3D surface topography are reviewed，and their advantages and disadvantages are compared．Then the high-precision 3D surface topography based on scanning white—light interferometry is concentrated． In the paper,a scanning white—light interferometer based on Linnik interferometry is set up for experimental research．To obtain a series of interferograms，the reference anti is used as the scanning arm，which is driven by a PZT actuator．The interferograms are grabbed by a CCD camera and analyzed to determine the comparative height of the measured surface．To know the factors affecting the experimental accuracy,the PZT scanning interval and non·linearity,CCD haging quality and the wavelength disturbance of the white—light SOurce，etc，ale investigated．The calibration methods of the corresponding parameters related to the topographic accuracy are studied． To determine the height data of the 3D surface topography from the scanning white·light interferometry,the computational algorithm in the frequency domain for demodulating the interferograms and the technique for reducing the ambiguity in the phase data are studied． In the end of the paper,the computational algorithm is verified by means of a simulation method．The simulation results are illustrated that the algorithm