剪切散斑相移技术研究-光学专业论文.docxVIP

山东师范大学硕士学位论文移棱镜相移法可以有效地从干涉条纹中定量提取位移导数信息。 山东师范大学硕士学位论文 移棱镜相移法可以有效地从干涉条纹中定量提取位移导数信息。 关键词：电子散斑干涉；电子剪切散斑干涉；相移；沃拉斯顿棱镜；误差 分类号：0438 山东师范大学硕士学位论文Stlldy 山东师范大学硕士学位论文 Stlldy of the phase-shifting technique in ESSPI Abstract Speckle metrology is an importam b船nch of optical me硒m班呦t techni小les． Sp∞He tcchniques mal【e璐e of 1aser spcckl髓fomled in space∞砌ciaI spIecHes depositcd∞the sp∞imen surfke to monitor displacem∞t or to carry out d‘舳ation me船urement．h tlle past thr∞decades，in addiⅡon to thc stIldy of the inhe删propcmes of l船er spec】(1e五elds，ⅥIrio璐speckle m蜘吼矾柚ent techniques a他伊adhlally dcvdopcd and弼dely applied in di|Ibrem fields． El∞咖ic specUe patt咖硼耵晒伽删巧正sPD，砌ch us鹤伍nge纽alysis for nondestn】ctive defo彻ation ficld m既嘲lr锄锄ts，h勰becon地an i玎邛删忉m tcchllique in廿∞代ccnt 20 years．E1ec廿0nic Speckle·shearing htcIfe砌me虹y正SSPI)is a蜊 method which developed￡『om Elec们nic spccl(1e p蚍锄锄[cr‰e缸y饵SPD．11lc mdhod h弱m锄y钺Ivamages ofthe Whole一丘eld me船uremcnt，thc s呻le op垃cal road， tb靠easy mo捌adOn∞d the low d‘mland fbr cIrviro衄ent．The phase-8lli‰g me吐lod 砌ch is u∞d iIl ESSPI c趾improve the pmcisi∞of廿圮me姻删础mt grea廿y．So me pb∞e-shiflillg me也od is璐ed in卜№Des咖而Ve Testing州D1)widely． In也is dissenation，Elec缸伽血Speckle．shearing kcer触伽埘巧①SSPI)弛d灶幢 phase．shifcillg techniq∞am detailedly discllsSed．1h删曲c∞tell乜a∞des甜bed勰 让忙蕾出州衄j 1、A re“钾of de、rclopmem of Specl(1e me虹olOgy is presented．The main 删q懈，such 嬲 Elec呦ic 印ecⅪe patt锄interferom曲了 @SPI)and specHc-shearing hteri幻ome时正SSPI)are sIl|nmarizcd． 2、PI{nciple of the pha∞me船瑚em锄t nlemod is in砌uce正1k p豳ciple，the me也0d and也e aritl皿etic ofthe ph勰e—shifIi：ng tcchniqlle is specially in_昀duce正 3、Becau∞two sb觑耐地object be锄s仃avcl in the same direction讨h吼 坐查婴蔓盔堂堡圭兰丝堡茎Wbllaston 坐查婴蔓盔堂堡圭兰丝堡茎 Wbllaston prism is llscd勰image-sh谢ng device in仃admonal specHe Shearing interf色romet移It is di伍clllt to rcalizc phase·sMRing tecllniqlle by separating也e two bc{mls．The ph船e-shif【s method of也c们11slating Wbllaston砸sm can intro(1ucc ad跚011al ph嫩谢mout sepa加g也e two beams．1Ks papcr gives tlle theoretical