基于MEMS技术的光学读出非制冷红外成像系统研究-固体力学专业论文.docx

摘要系统的原理样机，虽然其成像效果与放置在防震台上的实验系统有明显差距，但 摘要 系统的原理样机，虽然其成像效果与放置在防震台上的实验系统有明显差距，但 仍获得了室温物体的红外图像。 关键词：红外成像、非制冷、焦平面阵列、光学读出、双材料微悬臂梁 Ⅱ AbstractABSTRACT Abstract ABSTRACT Currently，infrared imaging has been a key technology in variety of military,in． dustrial，and commercial applications，especially uncooled infrared imaging has drawn substantially increased attention for its small dimension，low cost and high performance．Based on past achievements，this dissertation primarily studied a novel MEMS based optical readout uncooled infrared imaging system．ne chief contents include：the finite element analysis and structural design of substrate．free focal plane array(FPA)，the optimization of optical readout method，the miniaturization and in． dustrialization of uncooled infrared imaging system．ne main achievements of this dissertation ale as follows： (1)Based on the finite element method，the three．dimensional(3．D．)finite ele． merit models of substrate／substrate—free FPA with 80x80 pixels were developed,and then using the sequential approach of multiphysics analysis in ANSYS software，the thermal and mechanical characterizations of substrate／substrate．free FPA were irives． tigated and found that： (a)As compared with the substrate FPA，because of the large decrease in thermal conductance，the supporting frame is a temperature-variable one．This brings out a unique thermal characteristic：(i)the supporting frame functions as a‘thermal isola． tion’frame which reduces the thermal conductance and therefore increases the tern． perature change；(ii)the supporting frame also functions as a‘thermal diffusion’frame which certainly results in the temperature pre-change in the ones not absorbing radia- tion．The linear superposition of the temperature pre．change by the other ones thus will greatly increase the temperature change．1}lis characteristic will significantly in． crease the energy conversion efficiency,even with a magnitude of one order． (b)Because the supporting frame is a temperature-variable st