金属氧化物气敏传感器的稳定性与一致性研究-材料学专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II万方数据 II 万方数据 Abstract Gas sensors as the signal conversion equipment from the physical and chemical parameters of gas to electronic, play an important role in the moment. However, stability and consistency as thet wo most important properties of gas sensors, in the current study, were relatively lack of data, and consistency was even almost no available literature for reference. Stability and consistency are important indicators which relate to the prospect of the gas sensors. The purpose of this paper is to explore the effect of nano SiO2 which doped to metal oxide semiconductor gas sensors for stability, and the impact of improved screen printing technology on the device consistency. In this article,we prepared amorphous nano-SiO2 sol by sol-gel method,and doped the SiO2 sol into nano-ZnO, In2O3, WO3 powders . Then sintered the doped ZnO , and made eight different gas sensors which based on the doped In2O3 and WO3 materials. We use stability conformance test platform which made by ourselves for accelerating aging tests under air and ethanol atmosphere. It was found that SiO2 could effectively improve the stability of the sensor, and can also improve the sensitivity of the sensors in a certain extent . Additionally, it can achieve automatic alignment and overprinting of the sensing film through the improvement of the traditional screen printing technology. The device which were made by manual and automatic techologies were investigated their consistency in the stability conformance test platform. It was found that compared with traditional manual alignment techology, using automatic alignment techology can significantly improve the printing precision of the sensing film while the consistency of the device has also been greatly improved. Key words：Metal oxide ; Gas Sensor;Nano SiO2; Screen Printing; Stability; Consistency PAGE IV万方数据 PAGE IV 万方数据 目 录 摘 要 I Abstract II 1 绪论1 1.1 前言1 1.2 半导体气敏传感器的分类及工作原理2 1.2.1 半导体气敏传感器的分类2 1.2.2 半导体气敏传感