材料表面两层薄膜硬度的测试计算_英文_.docxVIP

HardnessM ea surem en t and Eva lua tion of Double- layer F ilm s on M ater ia l Surface WAN G L in2dong1 , L IM in2 , L IAN G N ai2gang1 (1. S tate K ey L ab. of N onlinear M echanics, Institu te of M echanics, Chinese A cad em y of S ciences, B eij ing 100080, China) (2. D ep t. of F lig h t V eh icle D esign and A pp lied M echanics, B eij ing U niversity of A eronautics and A stronautics, B eij ing 100083, China) Abstract: A m ethod fo r hardness m easurem en t and evaluation of double2layer th in film s on the m aterial surface is p ropo sed. F irstly, it is studied how to obtain the fo rce2inden tation respon se w ith the fin ite elem en t m ethod w hen the inden tation is less than 100 nanom eters, in w h ich curren t nano in2 den tation experim en ts have no reliable accuracy. T he w ho le hardness2d isp lacem en t curve and fitted e2 quation are obtained. A t last, a fo rm ula to p redict the hardness of the th in film on the m aterial sur2 face is derived and favo rably compared w ith experim en ts. Key words: double2layer film s; hardness; nano inden tation; fin ite elem en t sim ulation 材料表面两层薄膜硬度的测试计算. 王林栋, 李 敏, 梁乃刚. 中国航空学报 (英文版) , 2003, 16 (3) : 212- 216. 摘 要: 给出了基于纳米硬度试验的二层薄膜的硬度测算方法。首先利用有限元方法探讨了二层 薄膜- 基体材料系统的硬度随压痕深度变化的规律, 进而推导和验证了材料系统硬度- 位移曲线 的拟合公式, 最后给出了以压痕实验为基础的二层薄膜材料硬度的计算公式。 关键词: 两层薄膜; 硬度; 纳米压痕; 有限元模拟 文章编号: 100029361 (2003) 0420212205 中图分类号: V 250. 3; TH 140. 2 文献标识码: A W ith the rap id developm ent of surface engi2 neering techno log ies and their successful app lica2 tion s in variou s secto rs of industry, the m icro2scale indentation test, esp ecially the nanoindentation test has becom e one of the basic m ethods to p robe the m echanical p roperties of a lo t of new engineer2 ing film s. How ever, fo r film s from one to hun2 dreds of nanom eters th ick, the difficulties associat2 ed w ith the m easurem ents of th in film p roper