材料表面薄膜硬度的测试计算_英文_.docxVIP

HardnessM ea surem en t and Eva lua tion of Th in F ilm on M ater ia l Surface WAN G L in2dong, L IM in, ZHAN G T ai2hua, L IAN G N ai2gang (S tate K ey L ab. of N onlinear M echanics, Institu te of M echanics, Chinese A cad em y of S ciences, B eij ing 100080, China) Abstract: A m ethod fo r hardnessm easurem en t and evaluation of th in film s on the m aterial surface w as p ropo sed. F irstly, it is studied how to obtain the fo rce2inden tation respon se w ith a fin ite elem en t m ethod w hen the inden tation is less than 100 nanom eters, in w h ich curren t nano inden tation experi2 m en ts have no t reliable accuracy. T he w ho le hardness2inden tation curve and fitted equation w ere ob2 tained. A t last, a fo rm ula to p redict the hardness of the th in film on the m aterial surface w as derived and favo rably compared w ith experim en ts. Key words: th in film m ateria l; hardness; nano inden tation; fin ite elem en t sim ulation 材料表面薄膜硬度的测试计算. 王林栋, 李 敏, 张泰华, 梁乃刚. 中国航空学报 (英文版). 2003, 16 (1) : 52- 58. 摘 要: 给出了基于纳米硬度试验的表层薄膜的硬度测算方法。首先研究如何利用有限元计算弥 补纳米硬度测量在压痕深度小于百纳米时的精度缺陷, 进而探讨薄膜- 基体材料系统的硬度随压 痕深度变化的规律, 最后导出了根据实验曲线预测表层薄膜材料的硬度的公式, 并进行了实验验 证。 关键词: 薄膜材料; 硬度; 纳米压痕; 有限元模拟 文章编号: 100029361 (2003) 0120052207 中图分类号: V 252; T G113. 25+ 1 文献标识码: A To m eet the requirem ents of w ear2resistance, corrosion2resistance and fatigue2resistance, the m aterials w ith a th in film on the surface have at2 tracted a great deal of attention and have been w idely used in m any industrial fields such as aero2 nautics, astronautics, vessel and automobile engi2 neering, etc. For exam p le, heat2resistance coating techno logy is adop ted on the blade of an aeroengine in order to im p rove perfo rm ance and increase its service life. In p ractice, how to obtain the m e2 chanical p roperties of th in film m aterials is a gener2 al p roblem and evaluating the hardness w ith nan