基于透明陶瓷二元光学元件设计与制作-光学工程专业论文.docxVIP

II II Abstract Binary optics elements are not only the key components of fabricating micro optoelectronic systems, but also the key components of fabricating micro-optical electromechanical system (MOEMS). Binary optics elements have small size, light weight and low cost. They can fulfill new functions which are difficult for the ordinary optical elements, such as micro-size, arrays, integration, imaging, transformation and so on. Nowadays, following the rapid development of the science and technology, binary optics elements play more and more important role in various application areas. There are higher requirements on the process and applicatio n of binary optics elements. Because of superior physical and chemical properties, excellent optical characteristics, transparent ceramics, a research hotspot in materials field, has wide application prospects. This paper presents the research work focusing on various optionality of materials, one of advantages of binary optics elements. This paper is trying to fabricate binary optics elements by using transparent ceramics as base materials. Silicon wafer, metal and glass are ordinary base materials. These materials have advantages. Their deficiencies are also exposed in daily use. Transparent ceramics have the characteristics of acid-resistant, alkali-resistance, heat resistance, high strength, and high transmittance in a multi-band and broad-spectrum area. Even in the far infrared region, there is 80% linear transmittance. Using transparent ceramics as base materials enable the elements work in more complex environment. It also enlarges the application range. Given the characteristics of transparent ceramics, this paper is researched by “addition” scheme and “subtraction” scheme. In “addition” scheme, given the nature of transparent ceramics, coupled with “addition” processing in lithography, a uniform dense metal film is deposited on transparent ceramics by magnetron sputtering coating technology. Metal film is