惯性微开关的制作及正性厚胶工艺研究-微机电工程专业论文.docxVIP

惯性微开关的制作及正性厚胶工艺研究Fabrication 惯性微开关的制作及正性厚胶工艺研究 Fabrication of Metal Inertial Switch and Process of Thick Positive Photoresist Abstract With the development of micro—fabrication technique，micro metal devices with specific function are widely used in signal detection，disease analysis，weapon system，aerospace， bio-engineering and other fields because of its small size，low cosL superior performance． Based on UV lithography and micro-electroforming．UV-LIGA process is all effective way tO fabricate micro devices．TlliS paper studied the fabrication process of a cross—scale metal inertial switch with h