AlAl2O3多层膜的表面和界面的分析研究-中国科技论文在线.PDFVIP

中国科技论文在线 第 22 卷 　第 1 期 真 　空 　科 　学 　与 　技 　术 　　　　　　　　　　 ( ) 　　　　　　　　　　　　　　 2002 年 1 月 VACUUM SCIENCE AND TECHNOLOGY CHINA 73 　 Al/ Al O 多层膜的表面和界面的分析研究 2 3 薛钰芝 　　　　　　　　　　　Martin A Green 　 ( ) ( ) 大连铁道学院 　大连 　116028 　 澳大利亚新南威尔士大学光伏工程研究中心 Surface and Interface Studies of Al/ Al O Multilayers 2 3 Xue Yuzhi 　　　　　　　　　　　　　　　　Martin A Green 　　　　　　 ( ) ( ) Dalian Railway Institute , Dalian , 116028, China 　 The Centre of Photovoltaic Engineering , University of New South Wales , Sydney 　　Abstract 　Al/ Al O nanolayeres were grown on glass substrate by vacuum deposition followed by spontaneous oxidation. The microstruc 2 3 tures of the films were characterized with transmission electron microscopy ( TEM) and Xray photoelectron spectroscopy (XPS) . The stoichio metric ratio of Al and O in the multilayers were found to be 143～185. The XPS results show that the thickness of Al oxides ranges from 20 to 50 nm. The XPS depth profile of the two bilayered sample revealed welldefind periodic interface boundaries and the TEM micrograph of a 5 bilayers film clearly shows the alternating layers with a bilayer period of 4 nm. 　　Keywords 　Al/ Al O Multilayers ,Surface analysis