集成电路工艺1科目讲解.ppt

Explosive Growth of Computing Power Pentium IV 1st transistor 1947 1st electronic computer ENIAC (1946) Vacuum Tuber 1st computer(1832) Macroelectronics Microelectronics Nanoelectronics 2003 Itanium 2? 1971 4004 ? 2001 Pentium IV ? 1989 386 ? 2300 134 000 410M 42M 1991 486 ? 1.2M transistor /chip 10 μm 1 μm 0.1 μm transistor size Human hair Red blood cell Bacteria Virus No complete technological solution available !!! Physical gate length in nm Year Gate Source Drain silicide metal metal channel gate oxide We are here. IT