激光激励的微结构动态特性测试技术研究-机械电子工程专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II万方数据 II 万方数据 Abstract With the extensively application of MEMS (Micro-Electro-Mechanical System), it is dispensable to conduct dynamic test experiments with new excitation methods to obtain the mode parameters of micro-structure. In this paper, we propose a new excitation method, laser impact excitation method, which take use of the impact force of laser and tested structure interaction as excitation. One distinguish advantage of this excitation method is short excitation duration, wide excitation band and non-contact excitation, which means wide excitation frequen