锂磷氧氮LiPON薄膜电解质和全固态薄膜锂电池研究.PDF

2004 62 Vol.62, 2004 22 , 2223 ～ 2227 ACTA CHIMICA SINICA No.22, 2223 ～ 2227 (LiPON) 刘文元　　傅正文　　秦启宗 (　　 200433) 　Li PO (LiPON), 3 4 300 K 6.0×10-7 S/cm, 10-10 S/cm, 5.0 V. (PLD)Ag V O , , LiPON , 0.5 2 5 2 Li/LiPON/Ag V O .14 μA/cm /, 62 μAh · 0.5 2 5 cm-2 ·μm-1, 10 , 0.2%, 550 . 　, , LiPON, , Studies on Lithium Phosphorous Oxynitride Electrolyte Thin Films and a New All-solid-state Thin Film Lithium Battery LIU, W n-Yuan 　　FU, Zh ng-W n 　　QIN, Qi-Zong (Laser Chemistry Institute Department of Chemistry, Shanghai Key Laboratory of Molecular Catalysts and Innovative Materials, Fudan University, Shanghai, 200 33) Abstract　Lithium phosphorous oxynitrid (LiPON)l ctrolyt thin films hav b n fabricat d by nitrog n plasma- assist d d position coupl d with l ctron-b am r activ vaporat d Li PO for th first tim .This l ctrolyt thin film, 3 4 d posit d at th nitrog n plasma r actor pow r of 350 W, was found to b amorphous with th ionic conduction of -7 6.0×10 S/cm at 300 K and an l ctroch mical stabl window of 5.0 V.By using th LiPON thin film, a n w all- solid-stat thin film lithium batt ry of Li/LiPON/Ag V O has b n succ ssfully pr par d .Th cathod thin film of