面向仿生微纳导航系统的偏振器研究-机械电子工程专业毕业论文.docxVIP

大连理工大学硕士学位论文摘 大连理工大学硕士学位论文 摘 要 本文采用微纳偏振敏感阵列模拟沙蚁复眼的构想，仿造沙蚁复眼结构设计制作微型 偏振器，使具有高灵敏度、高精度、低功耗、微体积的仿生视觉传感器的研制成为可能。 主要研究内容为金属光栅偏振器的设计仿真与偏光膜的制作测试，这两种偏振器件的研 究为微纳导航系统的实现奠定了基础。 针对仿生微纳导航系统敏感波段0．52-0．59 la m的要求，基于严格耦合波理论及 Gsolver软件对金属光栅偏振器的结构进行设计并优化。分析了不同光栅材料、光栅面型 及光栅结构参数对TM偏振透射率及透射消光比的影响，确定了最优的光栅结构参数。所 设计的光栅与传统金属光栅不同之处在于基底和光栅之间增加了氟化镁介质，在垂直入 射条件下，TM偏振透射率及消光比都增大。在0．38 IJ．m～0．40 1．t m及O．50 11 m～O．76 la m全 光波段内，TM偏振透射率都大于50％，消光比都大于170，达到了宽带宽、TM偏振透射率 及透射消光比都较高的要求。 采用流延法制备聚乙烯醇偏光膜，制作出具有良好偏振度和透光率的偏光膜。用 Marc软件对偏光膜力学性能进行分析，建立偏光膜应力松弛模型及拉伸有限元模型，分 析其应力值随拉伸比的变化情况及应力松弛现象。用紫外可见分光光度仪对偏光膜光学 性能进行观察，结果表明偏光膜透光率和偏振度都随拉伸比的增大而增大。探索偏光膜 光刻工艺，制作透光轴垂直的二维偏光膜，测得了良好的光学性能。这对偏光膜与光电 薄膜的集成工艺有重要参考价值。 关键词：严格耦合波分析；金属光栅偏振器：偏光膜；聚乙烯醇；偏振度 面向仿生微纳导航系统的偏振器研究Research 面向仿生微纳导航系统的偏振器研究 Research on the Polarizer for the Bionic Micro—llano Navigation System Abstract In this thesis．the concept也丑t micro-nano polarization sensitive arrays simulate tlle compound eyes of the desert ant is introduced．nle structure of the compound eyes of the desert ant is simulated，and the micro-polarizer is designed and fabricated．So it is possible to develop a micro-bionic vision sensor that is hi曲sensitivity，high accuracy and low power consumption．Tbe design and the simulation ofthe wire一鲥d and the fabrication and the test of the polarizing film are mainly studied．111e research of the two polarizers lays the foundation for the realization ofthe micro—nano navigation system． According to the request of the sensitive wave band of 0．52．0．591xm of the Bionic Micro—llano Navigation System，wire-鲥d is designed using the rigorous couple—wave theory， and its structure is designed and optimized by Osolver software．Effects of different掣atir喀 materials．grating shapes and grating parameters on the TM polarization transmission efficiency as well as the extinction ratio are analyzed,and the corresponding wire-鲥d polarizer is designed．Wkn it works at the normal incidence．difference between the designed grating and conventional wire-嘶d is that the former adds the