阳极氧化法制备壁垒型Al2O3绝缘膜的研究.PDF

33 1 2013 1 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 35 Al O 2 3 1 1* 1 1 1 2 1 洪春燕 叶 芸 郭 凡 李 松 林之晓 蒋亚东 郭太良 ( 1 350002; 2 610054) Fabrication of Barrier Anodic Alumina Insulation Membrane by Anodization 1 1* 1 1 1 2 1 Hong Chunyan , Ye Yun , Guo Fan , Li Song , Lin hixiao ,Jiang Yadong ,Guo Tailiang ( 1College of Physics and Inf ormation Engineering, Fuzhou University, Fuzhou 350002, China; 2State Key La oratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China) Abstract The barrier anodic alumina membraneswith good insulation performance were prepared via chemical route by anodization of pure Al coatings, 1m thick, deposited by magnetron sputtering on glass substrates.The impacts of the preparation conditions, including the compositions of the electrolytes, and anodization voltage on its property of the mem brane were evaluated. Itsmicrostructureswere characterized with scanning electronmicroscopy and energy dispersive spec troscopy.Under the optimized conditions: a solution of 95% glycol, 19% ammonium sebacate, and 31boracic acid, the high quality Al2O3 membrane was obtained.The measured results show that the Al2O3 membrane, a few nm in thickness, possesses an excellent insulation,with a breakdown field of 525 MV/ cm. Keywords Anod