李萨茹扫描式微型激光投影显示技术研究-测试计量技术及仪器专业毕业论文.docx

西北工业大学博士学位论文 西北工业大学博士学位论文 Ab Abstract 万方数据 万方数据 万方数据 万方数据 II Abstract Pico laser projector is a great development trend of projection display in future, which possesses the advantages of laser technology and MEMS technology, such as excellentcolor performance, high brightness, long life, small volume, light weight and low power consumption.According to the different methods of projection, pico laser projector is mainly divided intoarray modulation mode and scan mode.Compared with the former, the latter could provide system more simple and compactstructure, which is very suitable for developing the portablepico laser projectoror being integrated into other electronic equipment.Therefore the pico laser projector based on scan modehas becomeresearch focus of micro laser projection display. In this paper, the miniaturization of laser projection display based on lissajous scanning was focused on and the projection theory wa s deeply researched. In order to realize QVGA resolution and higherrefresh ratethan 30Hz, the scanning mirror, as the core element,was designed and fabricated by using silicon-on-insulator (SOI) process. Then, the realizing techniques of laser projector adopting the device sample were investigated.The specific research aspects are as follows: On the basis of lissajous motion, the principle of laser projection display based on lissajous scan pattern was analysed, and a number of techniques concerning the pixel definition, calculation of refresh rate and resolution, selection of operating frequency were studied in detail. Besides, an image processing algorithm was investigated to convert the storage style of traditional image from raster mode to lissajous time mode, and the image conversion with QVGA resolution was successfully simulated by using this algorithm. A two-dimensional resonant scanning mirror employing electrostatic comb drives was designed, and the relationship between structural parameters and operating frequency was also reaserched for d