Periodic Materials and Interference Lithography 周期性材料和干涉光刻.pdf

Periodic Materials and Interference Lithography 周期性材料和干涉光刻.pdf

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Martin Maldovan and Edwin L. Thomas Periodic Materials and Interference Lithography Related Titles Sailor, M. J. Porous Silicon in Practice Preparation, Characterization and Applications 2009 Softcover ISBN: 978–3–527–31378–5 Kaskel, S. Porous Materials Introduction to Materials Chemistry, Properties, and Applications 2009 Softcover ISBN: 978–3–527–32035–6 Misawa, H., Juodkazis, S. (eds.) 3D Laser Microfabrication Principles and Applications 2006 Hardcover ISBN: 978–3–527–31055–5 Martin Maldovan and Edwin L. Thomas Periodic Materials and Interference Lithography for Photonics, Phononics and Mechanics The Authors All books published by Wiley-VCH are care- fully produced. Nevertheless, authors, editors, Dr. Martin Maldovan and publisher do not warrant the informa- MIT tion contained in these books, including this Materials Science Engineering book, to be free of errors. Readers are ad- 77 Massachusetts Avenue vised to keep in mind that statements, data, Cambridge, MA 02139 illustrations, procedural details or other items USA may inadvertently be inaccurate. Library of Congress Card No.: Prof. Edwin L. Thomas applied for MIT Materials Science Engineering 77 Massachusetts Avenue British Library Cataloguing-in-Publication Data Cambridge, MA 02139 A catalogue record for this book is available USA from the British Library.

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