半导体物理器件历史简介.ppt

Fundamentals of Semiconductor Physics 万 歆 Zhejiang Institute of Modern Physics xinwan@ /~xinwan/ In memory of Prof. Xie Xide (1921-2000) Syllabus 半导体电子学基础 - 12学时a) 键和能带 b) 杂质和缺陷 c) 载流子的统计分布 d) 电荷输运 半导体硅工艺 - 3学时 结和接触 - 9学时a) p-n结 b) 异质结 c) 金属-半导体接触 MOS（金属-氧化物-半导体）和金氧半场效应管 - 6学时 低维系统 - 6学时a) 二维电子气和量子霍耳效应 b) 量子线 c) 量子点 自旋电子学 - 6学时a) 巨磁阻 b) 磁性半导体 c) 自旋输运和自旋器件 学生报告 - 6学时 Solid State Physics Books Chapter 0. Introduction 0.1 Among Chinese who brought semiconductor physics to China are Huang Kun （黄昆） Xie Xide （谢希德） 0.2 Motivation 0.3 Past, now and future 0.3.1 Invention of transistor 0.3.2 Semiconductor industry 0.3.3 Future Motivation Rapid development in semiconductor industry Requires fundamental understanding of semiconductor physicse.g., transistors, giant magnetoresistance (GMR), … Motivates fundamental physics problemse.g., disordered physics, magnetic semiconductors Leads to innovated samples and techniques for experiments e.g., two-dimensional electron gases, quantum wires, dots, … Story: The rise and fall of Bell Laboratories Some Devices 1907 LED Round 1947 BJT Bardeen, Brattain Shockley 1949 p-n junction Shockley 1954 Solar cell Chapin, Fuller Pearson 1960 MOSFET Kahng Atalla 1962 Semicond. laser Hall et al. 1967 NVSM Kahng Sze 1970 CCD Boyle Smith 1974 RTD Chang, Esaki Tsu 1988 GMR Fert et al. / Grünberg et al. The Transistor Semiconductor Industry Moore’s Law 动态随机存储器密度呈指数增长 半导体器件中不同技术的成长曲线 * Fall 2006 Textbooks Ashcroft Mermin Kittel *