三维互连电感电阻的快速提取.PDF

11 Vol. 30 No. 11 2002 11 ACTA ELECTRONICA SINICA Nov. 2002 杨 柳, 王泽毅 ( , 100084) : VLSI , 2GHz. , ., , . , , FastHenry[ 1] . : VLSI; ; ; ; : O241 : A : 03 22112 (2002) A 3D Fast Inductance and Resistance Extractor for Interconnects YANG Liu,WANG Zeyi ( Dep t . of Computer Science Technology , Tsinghua University, Beji ing 100084, China) Abstract: With the development of the VLSI circuits, the feature size has been decreased to the deep submicron level, and working frequency has reached to 2GHz. In order to assure the correctness of the IC design with high performance, the parasitic inter connect inductance and resistance should be calculated quickly and accurately. In this paper,we propose a description format to fit for 3D hierarchical interconnect, an approach to automatically partitioning filaments in consideration of skin effect.An improved multipole accelerative computation based on the nonuniform cube subdivision is implemented. Numerical results show that it runs faster than the FastHenry[ 1] from several to several tens times with comparable accuracy. Key words: VLSI; parasitic inductance; PEEC; skin effect; multipole acceleration 1 , . VLSI 0. 18 5- 6 , [ 1] , 2GHz , . , . , , , , , , . , , FastHenry , , , . , [ 3] , [ 1] . , . , ( 3D) ,