气体放电和各种等离子体源幻灯片.ppt

Electron Motion in Glow Discharge Plasma Electrons repeatedly return to the cathode at time intervals of ?/?c. Electron motion is strictly confined to the cathode dark space where both fields are present. However, if electrons stray into the negative glow region where E is small, they describe a circular orbit before collisions may drive them either back into the dark space or forward toward the anode. Confinement in crossed fields prolongs the electron lifetime over and above that in crossed fields, enhancing the ionizing efficiency near the cathode. A denser plasma and larger discharge current result. * Radial Electric Potential around an Isolated Positive Ion * AC Effects in Plasmas Maximum electron displacement amplitude Assuming no collisions of electrons with neutrals, Ionization energy Field Strength required to ionize gas. Eo = 11.5 V/cm is an easily attainable field in typical plasma reactors. No power is absorbed in the collisionless harmonic motion of electrons, however. For electrons undergo inelastic collisions, Electron motion is randomized and power is effectively absorbed from the RF source. Even smaller values of Eo can produce ionization if, after electron-gas collisions, the reversal in electron velocity coincides with the changing electric-field direction. Through such effects RF discharges are more efficient than their DC counterparts in promoting ionization. * Electrodeless Reactors Inductive coupling Capacitive coupling However, for the deposition of films by RF sputtering, internal cathode targets are required. * Electrode Sheaths Both anode and cathode surfaces will be at a negative floating potential (Vf) relative to the plasma potential (Vp) Lower electron density in the sheath means less ionization and excitation of neutrals. Less luminosity there. Large electric fields are restricted to the sheath regions. It is at the sheath-plasma interface that ions begin to accelerate on their way to the target during sputtering. The plasma is typica