基于模块化的保偏近场扫描光学显微镜近场探测及刻写-精密仪器及机械专业论文.docxVIP

中国科学技术大学硕士毕业论文Abstract 中国科学技术大学硕士毕业论文 Abstract SNOM were widely used in Nanometer—scale detection and writing．It was attracted much attention in America，Japan，Germany，and much resource was devoted to that．While in China，the development of SNOM started only from recent years．We developed a novel modularized SNOM with the modularization idea based on TopoMetrix company’S product．The SNOM includes modules such as tuning—fork optical fiber probe，scanning head and scanning platform，and etc，of high performance and easy operation．The platform adopts the horizontal light pass which prevents the polari