课件：WAInroducionAndy.pptVIP

* Enter the User Bin numbers in the Yield column. Denominator must include Numerator. Enter the pass rate target value in the Tgt column. If the calculated pass rate is under the target value, the item is judged FAIL. Connection with EDA Wafer Fabrication Reticle Fabrication Implant Diffusion Oxidation Deposition Planarization CMP Resist Coat Stepper Expose Develop Etch/ Clean Parametric Probe Wafer Sort Final Test Bitmap Yield Management Backbone WIP, Tool Process Parameters, Design, FA Manufacturing Execution Systems Other Data Sources Wafer Fab Test Floor Other Data Sources Office Desktop MES Wafer Fab Test Floor The End WAT Hold Rule Hold any wafer that has fail sites ≧ 3 (must be ) Hold a lot when fail wafers ≧ 4 Hold a lot when same parameter fail ≧ 10% sites Hold a lot if it violate user defined hold rules (internal requirement) Other requirement from customer Hold a lot when same sites fail ≧ 25% (customer requirement) Product ≧ 80% pass rate (customer requirement) Tester The main part of the WAT system, which generates test signals and does the measurements. The tester also acts as the controller of the prober during testing. Cabinet: Workstation ( hp C3600 ) CMU ( Agilent 4284A ) DVM ( Agilent 3458A ) PGU ( Agilent 81110A ) Test Head Test head A part of the Tester, which transfers the signals that is generated by the instrument of the tester. Furthermore it can do some DC measurement by itself . 8 32 28 24 48 20 16 4 12 44 40 36 CPU Diag Board Input Selector 8 SMUs GNDU Matrix 48pin . . . 8 AUX Terminals Chuck Terminal 48-Input Extended Path . . 6 HF Terminals . . 7 Pulse Switch Terminals To set the User Bins User Bin1 User Bin2 User Bin3 (limit6) (limit5) (limit4) (limit3) (limit2) (limit7) User Bin1 User Bins must be specified as Set Lo/Hi limits of User Bins using Binning Limit number (1-10), -(MINREAL) and +(MAXREAL) User Bin2 User Bin3 User Bin6 Wafer Map Yield must be specified as Numerator Denominator Pass