微器件自动装配系统的定标和操纵策略.pdf

第 19 卷 　第 5 期 传 感 技 术 学 报 Vol . 19 　N o . 5 2006 年 10 月 CHIN ES E J OU RNAL O F S EN SORS AND AC TUA TORS Oct . 2006 Cal ibration and Handl ing Strategy of Automated Micro Assembly System W U J i anh ua , W U Yalei , C H U J i ar u ( ) D ep art ment of P recis ion M achi nery an d P recis ion I ns t rument at ion , Uni vers ity of S cience an d Technology of Chi na , H ef ei 230026 , Chi na Abstract :An automated micro assembly system is p resented here. A new selfcalibration met hod wit h scale factor optimization step s based on Tsai ’s twostage algorithm is applied to calibrate our system . Submicron in plane cali bration accuracy and more believable calibration angles can be achieved by our calibration met hod. A suitable envi ronment may facilitate t he handling op eration becau se t he adhesion forces between micro obj ect s are affected by en vironmental parameter s obviously . The pick and release strategies al so affect t he handling efficiency and micro ob j ect po sitioning accuracy . More attention should be paid on t hem. Our automated micro assembly system can locate and handle a micro part wit hin 10 seconds wit h a po sitioning accuracy of several microns. Key words :micro a ssembly ; micro scop e calibratio n ; scale f actor ; relative humidit y ; handlin g st rat egy ; han dlin g efficiency EEACC :7130 微器件自动装配系统的定标和操纵策略 吴建华 ,吴亚雷 ,褚家如 ( 中国科学技术大学 精密机械与精密仪器系 ,合肥 230026) 摘 　要 :主要研究了自动微器件装配系统的定标技术和操纵策略两个问题. 在加入了尺度因子优化步骤之后 ,一种基于 Tsai 两 步法的自定标方法实现了亚微米级的定标精度 ,并且获得了更加可信的定标角度参数. 这种定标方法应用于微器件装配系统中