我国微纳几何量计量技术的研究进展 - 道客巴巴.docxVIP

第8 第8期 高思田等:我国微纳儿何量计量技术的研究进展 1823 第8 第8期 高思田等:我国微纳儿何量计量技术的研究进展 1823 Vol. 38 No. 8Aug. 2017 Vol. 38 No. 8 Aug. 2017 第38卷第8期2017 第38卷第8期 2017年8月 Chinese Jounud of Scientific Instrument 我国微纳几何量计量技术的研究进展 高思田，李 琪,施玉书，李伟，黄鹭 (中国计量科学研究院 北京100029) 摘要:随着微纳技术中材料和器件关键尺寸的减小以及几何结构复杂性的增加，给微纳尺度的精确测量带来了新的挑战。微 纳儿何量计量技术主要是研究微纳尺度下测量量值的准确一致，并实现量值溯源到国际长度基本单位的科学。为保证微纳技 术的领先优势，国外先进国家一直高度重视微纳儿何量计量技术的研究。廿前，我国在微纳计量领域已成功研制了多种微纳儿 何量计量标准装置，并初步建立了我国自己的微纳计量溯源体系。对我国现有的微纳几何量计量技术与计量标准装置进行了 回顾和介绍，并对我国微纳计量的未来发展做出了展望。 关键词：微纳几何量；关键尺寸;量值准确;溯源；标准装置 中图分类号：TH711 文献标识码：A 国家标准学科分类代码：460.4030 Research progress of Chinas micro/nanometer geometric quantity metrology technology Gao Sitian, Li Qi, Shi Yushu, Li Wei, Huang Lu (National Institute of Metrology Beijing 100029. China) Abstract: In nanolechnology research area, since the material and devices critical dimensional size decrease as well as the geometric structure complexity increase, bringing the continuous challenges in micro/ nanometer accuracy measurements ? Micr()/Nd no meter geometric quantity metrology research is the way to keep measurement quantities accuracy, uniformity and all measurement results trace back to international length basic unit. In order to keep the countrys advantages in nanotechnology research and industry area, developed countries have edwaysattached great importance to nanometer geometric quantity metrology research? In China, currently we have also successfully built several micro/nanometer geometric quantity rneasurement standard devices, which preliminarily established our nation s nanometer standard traceability framework. The paper reviews the micro/nanometer measurement technologies and measurement standard devices in China, and discusses micro/nanometer metrologys development for future? Keywords:micro/nanometer geometric quantity； critical dimensional size； quantities accuracy； Traceability； standard device 收稿日期 收稿日期：20I7-05 Received Date: 2017-05 伙基金项目：国家重点研发计划(2016YFF0200602).国家重点研发讣划(2016YFF0200404)项目资助 o引 言 微纳技术口诞生之H起