微机械mems作业微粉末注射成型环形齿轮泵.pptxVIP

Development of a micro annular gear pump by micro powder injection molding;*List;1. Introduction;List;2. Design and preparation;List;List;3. Methods and procedures;List;FRT-Microglider:;List; · To meet the tight tolerances required for good efficiency of the annular gear pump, two complete sets of microparts were fixed at once on a glass substrate of three inch diameter by means of a special wax for the finishing operation steps. The challenge is to fix several microparts without tilting and flat on a glass substrate. ;List;;Therefore the diameter tolerances of +2 and ±0 μm of the outline of the internal as well as the external rotor were included which normally would not fit to each other (compare Fig. 4). However, since it turned out that LIGA is absolutely precise in the micometer range, this is a problem especially for the external rotor because only tolerances of ?2 and ?4 μm are useful at all now. Another problem is the measure tracing for outline differences of 2 μm in diameter. For this, the finishing steps like lapping and polishing as well as absolute cleanliness of the microparts are a prerequisite. Neither the external rotor outline nor the internal rotor outline is strictly circular. For lubrication purposes the external rotor has four flattenings. Therefore, image processing is the best choice to detect different rotor tolerances via the cross sections variation. From the present point of view oversized rotors are not necessary even if required tolerances are in the micron range. Instead, the space on the LIGA-mold insert should have been used for tolerances of ?6 and ?8 μm for the external rotor outline.;5. Conclusions;Special, for microparts adapted, injection machines like the Microsystem 50 by “Battenfeld” should be preferred to improve the relation of runner system to micropart and improve the overall process control. Thus, the homogeneity of the micropart can be improved and scrap can be reduced. In the project, a new method for the isolati