掩膜版(mask)制造技术.docVIP

Photomask Making Roger Robbins 3/6/2007 The University of Texas at Dallas Erik Jonsson School of Engineering Title: Photomask Making Page 1 of 24 Author: Roger Robbins 3/6/2007 Document Number: SP-07-001 The University of Texas at Dallas Photomask Making Roger Robbins 3/6/2007 Table of Contents Photomask Making2 Table of Contents 2 Photomask Making3 Purpose3 Introduction3 Mask “Color”3 Process Description4 Step 1: Plasma Cleaning4 Step 2: HMDS Application5 Step 3: Resist Application 6 Step 4: Pre-Bake8 Step 5: Lithographic Patterning 8 Step 6: Post Bake 10 Step 7: Develop10 Step 8