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TFT Array製程技術
~The Technology of TFT Array Processing
中小事業部 產品設計總處
面板設計處 AR設計部 isplaying your vision!
E/B and E/S TFT Structure
E/B Type TFT & Cs on Common TFT Array Structure
Data Line &
Source
Passivation SiNx
Glass Substrate
Gate Insulator Gate Line Cs Line & Cst
E/S Type TFT & Cs on Gate TFT Array Structure
Data Line
& Source
Passivation SiNx
Glass Sub.
is
Gate Insulator Gate Line & Cst
Pixel Elements
ispla
5-Photo Exposure Process
(8)ITO Pixel Electrode
Patterning (Mask 5)
(7)Contact Hole/ Window
Etching (Mask 4)
(6)Passivation Layer
Coverage
(5)Back Channel Etching
for B/E structure
(4)S/D Metal Patterning
(Mask 3)
Passivation
(3)a-Si Pattering
(Mask 2)
(2)SiN/a-Si/n+ a-Si
Deposition
Insulator
isplaying your vision!
(1)Gate Patterning
(Mask 1)
a-Si TFT BCE Profile
isplaying your vision!
From Innolux 7” 2005
GE Patterning (Mask 1)
isplaying your vision!
GI and SE Layer Deposition
ispl
SE Patterning (Mask 2)
Crossover Coverage
Active Layer
ispl
SD Patterning (Mask 3)
Data Line &
Source Electrode
isplaying your vision!
Back Channel Etching
Data Line &
Source Electrode
isplaying your vision!
CH Layer Deposition
Passivation Layer
(SiNx)
isplaying your vision!
CH Patterning (Mask 4)
Passivation Layer
(SiNx)
isplaying your vision!
PE Patterning (Mask 5)
Passivation Layer (SiNx)
isplaying your vision!
PVD/ Sputtering
isplaying your vision!
Metal and Alloy
Gate Source/Drain
AUO Mo/AlNd Mo/Al/Mo
Ti/Al/Ti
MoW
CMO MoN/AlNd MoN/Al/MoN
HANNSTAR MoW Mo/AlNd/Mo
Mo/AlNd/Mo
Innolux Al/Mo Mo/Al/Mo
AUO(QDI) Al/Ti Ti/Al/TiN
CPT Cr Cr
isplaying your vision!
AlNdN
MoNb
MoNb
Mo/Al/Mo
PECVD
Heat Stage
Substrate
isplaying your vision!
Thin Film Quality
? 理想的閘極絕緣層 (Gate insulator) 性質:
良好的階梯覆蓋能力 (Good Step Coverage)
適中的介電常數 (Dielectric Constant)
高崩潰電壓 (High Breakdown Voltage)
低薄膜應力 (Low Stress)
與a-Si 有良好的界面 (Good interface with a-Si film)
? 理想的保護層 (Passivation Layer) 性質:
抗水氣能力佳 (Diffusion Barrier Against Moisture)
抗鹼金屬離子滲透力佳 (Diffusion Barrier Against Alkali Ions)
硬度佳,可承受機械性刮傷
低製程溫度
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