tftarray制程技术简介(20080917).doc 38页

  • 0
  • 0
  • 0
  • 约3.82千字
  • 2020-06-07 发布
文档工具:
    1. 1、本文档共38页,可阅读全部内容。
    2. 2、本文档内容版权归属内容提供方,所产生的收益全部归内容提供方所有。如果您对本文有版权争议,可选择认领,认领后既往收益都归您。
    3. 3、本文档由用户上传,本站不保证质量和数量令人满意,可能有诸多瑕疵,付费之前,请仔细先通过免费阅读内容等途径辨别内容交易风险。如存在严重挂羊头卖狗肉之情形,可联系本站下载客服投诉处理。
    4. 文档侵权举报电话:19940600175。
    TFT Array製程技術 ~The Technology of TFT Array Processing 中小事業部 產品設計總處 面板設計處 AR設計部 isplaying your vision! E/B and E/S TFT Structure E/B Type TFT & Cs on Common TFT Array Structure Data Line & Source Passivation SiNx Glass Substrate Gate Insulator Gate Line Cs Line & Cst E/S Type TFT & Cs on Gate TFT Array Structure Data Line & Source Passivation SiNx Glass Sub. is Gate Insulator Gate Line & Cst Pixel Elements ispla 5-Photo Exposure Process (8)ITO Pixel Electrode Patterning (Mask 5) (7)Contact Hole/ Window Etching (Mask 4) (6)Passivation Layer Coverage (5)Back Channel Etching for B/E structure (4)S/D Metal Patterning (Mask 3) Passivation (3)a-Si Pattering (Mask 2) (2)SiN/a-Si/n+ a-Si Deposition Insulator isplaying your vision! (1)Gate Patterning (Mask 1) a-Si TFT BCE Profile isplaying your vision! From Innolux 7” 2005 GE Patterning (Mask 1) isplaying your vision! GI and SE Layer Deposition ispl SE Patterning (Mask 2) Crossover Coverage Active Layer ispl SD Patterning (Mask 3) Data Line & Source Electrode isplaying your vision! Back Channel Etching Data Line & Source Electrode isplaying your vision! CH Layer Deposition Passivation Layer (SiNx) isplaying your vision! CH Patterning (Mask 4) Passivation Layer (SiNx) isplaying your vision! PE Patterning (Mask 5) Passivation Layer (SiNx) isplaying your vision! PVD/ Sputtering isplaying your vision! Metal and Alloy Gate Source/Drain AUO Mo/AlNd Mo/Al/Mo Ti/Al/Ti MoW CMO MoN/AlNd MoN/Al/MoN HANNSTAR MoW Mo/AlNd/Mo Mo/AlNd/Mo Innolux Al/Mo Mo/Al/Mo AUO(QDI) Al/Ti Ti/Al/TiN CPT Cr Cr isplaying your vision! AlNdN MoNb MoNb Mo/Al/Mo PECVD Heat Stage Substrate isplaying your vision! Thin Film Quality ? 理想的閘極絕緣層 (Gate insulator) 性質: 良好的階梯覆蓋能力 (Good Step Coverage) 適中的介電常數 (Dielectric Constant) 高崩潰電壓 (High Breakdown Voltage) 低薄膜應力 (Low Stress) 與a-Si 有良好的界面 (Good interface with a-Si film) ? 理想的保護層 (Passivation Layer) 性質: 抗水氣能力佳 (Diffusion Barrier Against Moisture) 抗鹼金屬離子滲透力佳 (Diffusion Barrier Against Alkali Ions) 硬度佳,可承受機械性刮傷 低製程溫度

    文档评论(0)

    • 内容提供方:137****0427
    • 审核时间:2020-06-07
    • 审核编号:8006064037002115

    相似文档